JPH0552120B2 - - Google Patents

Info

Publication number
JPH0552120B2
JPH0552120B2 JP62228291A JP22829187A JPH0552120B2 JP H0552120 B2 JPH0552120 B2 JP H0552120B2 JP 62228291 A JP62228291 A JP 62228291A JP 22829187 A JP22829187 A JP 22829187A JP H0552120 B2 JPH0552120 B2 JP H0552120B2
Authority
JP
Japan
Prior art keywords
electrode
hole
ultrasonic transducer
semiconductor substrate
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62228291A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6472700A (en
Inventor
Kenichiro Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP22829187A priority Critical patent/JPS6472700A/ja
Publication of JPS6472700A publication Critical patent/JPS6472700A/ja
Publication of JPH0552120B2 publication Critical patent/JPH0552120B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Transducers For Ultrasonic Waves (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
JP22829187A 1987-09-14 1987-09-14 Ultrasonic transducer and its manufacture Granted JPS6472700A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22829187A JPS6472700A (en) 1987-09-14 1987-09-14 Ultrasonic transducer and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22829187A JPS6472700A (en) 1987-09-14 1987-09-14 Ultrasonic transducer and its manufacture

Publications (2)

Publication Number Publication Date
JPS6472700A JPS6472700A (en) 1989-03-17
JPH0552120B2 true JPH0552120B2 (en]) 1993-08-04

Family

ID=16874166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22829187A Granted JPS6472700A (en) 1987-09-14 1987-09-14 Ultrasonic transducer and its manufacture

Country Status (1)

Country Link
JP (1) JPS6472700A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4690813A (en) * 1984-09-14 1987-09-01 Alps Electric Co., Ltd. Molybdenum oxide whiskers and a method of producing the same
RU2468840C2 (ru) * 2006-10-23 2012-12-10 Конинклейке Филипс Электроникс, Н.В. Симметричные и предпочтительно отклоняемые случайные решетки для ультразвуковой терапии

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220600A (ja) * 1985-03-26 1986-09-30 Nec Corp 超音波センサ
JPS62149299A (ja) * 1985-12-24 1987-07-03 Agency Of Ind Science & Technol アレイ型超音波トランスデユ−サ

Also Published As

Publication number Publication date
JPS6472700A (en) 1989-03-17

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term